Nature research paper: 3D integration enables ultralow-noise isolator-free lasers in silicon photonics
-based inductively coupled plasma etching. The n-type contact-metal Pd/Ge/Pd/Au and another layer of Ti/Au on top of the p-type contact metal were deposited and formed. Proton implantation was performed to define the current channels. Ti/Pt was deposited as heaters for the phase tuner on Si and resonance tuner on SiN. The chip went through another round of SiOdeposition and contact via opening. The Ti/Au probe metal was deposited to finish the wafer fabrication.
We can thus lock the laser to different resonances by tuning the laser gain current. Besides, the thermal tuning of ring resonances allows the continuous tuning of the SIL laser wavelengths across the DFB laser wavelength. This capability is critical in microwave generation as microwave frequency can be synthesized precisely based on the laser gain and ring resonance controls.
. This wavelength separation promises >375-GHz millimetre-wave generation if a fast PD is available. More importantly, the phase noise will be the same as low carrier frequencies as it is determined by the laser phase noise.
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